Welcome to Francis Academic Press

Academic Journal of Engineering and Technology Science, 2024, 7(3); doi: 10.25236/AJETS.2024.070313.

Design and Optimization of Peninsula-island-based Diaphragm with Grooves for MEMS Pressure Sensors


Yang Sun

Corresponding Author:
Yang Sun

School of Electronic Information, Xijing University, Xi'an, China


This paper introduces a piezoresistive pressure sensor, which has an important application value in the pressure measurement of hydraulic system. A novel peninsula-island-based diaphragm with grooves is designed. The proposed diaphragm can ease the contradiction between sensitivity and non-linearity compared with the conventional diaphragm structures. Especially, the elastic potential energy is concentrated above the gap position, which greatly improves the sensitivity. The optimization process for the proposed diaphragm has been presented by the finite element method (FEM). The proposed sensor chip is potentially a better choice for the high sensitive pressure sensor.


MEMS; pressure sensor; peninsula-island structure with grooves; sensitivity; non-linearity

Cite This Paper

Yang Sun. Design and Optimization of Peninsula-island-based Diaphragm with Grooves for MEMS Pressure Sensors. Academic Journal of Engineering and Technology Science (2024) Vol. 7, Issue 3: 89-95. https://doi.org/10.25236/AJETS.2024.070313.


[1] Jiang, Z. (2018). Incorporation of beams into bossed diaphragm for a high sensitivity and overload micro pressure sensor. Review of Scientific Instruments, 84(1), 34-36.

[2] Kanda, Y., &Yasukawa, A. (1997). Optimum design considerations for silicon piezoresistive pressure sensors. Sensors & Actuators A Physical, 62(1-3), 539-542.

[3] Hein, S. Holzner, K. Schlichting, V., et al (1997). Capacitive differential pressure sensor with high overload capability using silicon. Sensors & Actuators A Physical, 72(2) 52-60.

[4] Xu, T. (2017). Application and Optimization of Stiffness Abruption Structures for Pressure Sensors with High Sensitivity and Anti-Overload Ability. Sensors, 17(9), 8-9.

[5] Huang, X. (2014). A high sensitivity and high linearity pressure sensor based on a peninsula-structured diaphragm for low-pressure ranges. Sensors & Actuators A Physical, 18(2), 176-189.

[6] Bashir R, Gupta A, Neudeck G W, et al. (2018). On the design of piezoresistive silicon cantilevers with stress concentration regions for scanning probe microscopy applications. Journal of Micromechanics & Microengineering, 10(4):483-491.