The dynamic model of a precision linear motion platform serves as the foundation for achieving high-quality motion at micro-stroke scales. The three fundamental elements of system motion are displacement, velocity, and acceleration. High-quality motion is ultimately reflected in displacement accuracy, while velocity and acceleration indirectly influence displacement precision. Therefore, this paper proposes a component-refined dynamic modeling method aimed at analyzing the variation patterns of velocity at micro-stroke scales. First, along the motion transmission path, motion types are distinguished, transmission modes are analyzed, and a qualitative dynamic modeling framework is established. Second, refined equivalent models of the input source and the motion conversion mechanism are developed respectively, and the coupling mechanism between them is constructed. Finally, the simulated velocity curves are compared with experimental velocity curves at stroke scales of 10 μm, 20 μm, 50 μm, and 100 μm. The method provides a certain degree of prediction of velocity magnitude, as well as the local peaks, troughs, and convergence trends of the velocity curves, thereby validating the effectiveness of the dynamic model.

Yan Tan, Hao Tang. Micro-Motion Characteristic Analysis of Precision Linear Motion Platform Based on Component-Refined Modeling. Academic Journal of Engineering and Technology Science (2026), Vol. 9, Issue 3: 41-50. https://doi.org/10.25236/AJETS.2026.090306.

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